Спектрометр TALYS ASP300 series ABB, Алматы

Wet bath monitoring analyzer
TALYS ASP300 series

Fulfills the needs of equipment suppliers to semiconductor, solar and LED Fabs. TALYS is a state of the art analyzer which is ideally suited for real time, in bath, monitoring of a wet etching, cleaning, and PR removal bath.

The TALYS- ASP300 series represents the latest generation of process analyzers for the Semiconductor industry. It provides semiconductor, LED and solar cell manufacturing with superior performance offered at a cost suitable for today's tightening budgets.

• The high performance results of the TALYS ASP300 series permits equipment operators and engineers to reduce chemical usage while minimizing excursion events with real time bath component predictions.

Key features

• Simplicity of operation eliminates the need for analyzer experts, runs 24/7 with data displayed on tool monitor.
• Reagent free operation reduces cost of ownership
• Low cost solution meets available budgets
• No wetted parts sampling eliminates the need for tubing modifications and ensures contamination control.
• Flexibility allows the analyzer's electronic configuration file to be uploaded from email for additional bath monitoring routines.
• Multiple bath chemistries can be monitored at one sample point, reducing the number of analyzers required.

TALYS is fully integrated in a single enclosure with a minimal footprint. TALYS communicated directly to the tool via Modbus TCIP, connects to the sample point remotely through fiber optics interface, the sample cell clips directly into existing PTFE tubing, does not require an external PC and can either be shelf-mounted or wall-mounted. TALYS installation is easy and can be performed in less than one day.
The sample cell is the patented Clippir cell. The Clippir is a no wetted parts cell that eliminates the need for tubing modifications and eliminates the risk of contamination. The Clippir permits simplified installation while the tool is operating.
Monitoring a recirculation bath
As the industry moves to on-the-fly chemical delivery, TALYS meets the need for a single analyzer to measure multiple chemistries flowing through a common tube. TALYS can quickly measure multiple chemistries at the same same sample point. Automatic bath selection via Modbus TCP outputs from the tool permits real time selection of the desired bath prediction routine.
When monitoring more than one bath chemistry on a tool, there is no need for a hardware change, no need for multiple analyzers and there is no need for manual intervention resulting in a sizable cost savings at the FAB. Imagine one analyzer measuring a delivery tube for SC1, SC2, BOE, BHF, DHF and ST-250 without manual intervention, all controlled by the tool PC.

Характеристики спектрометра TALYS ASP300 series АВВ

• — Конфигурация: инфракрасный
• — Страна производитель: Россия
• — Бренд: ABB